DISPERSIVE INTERFEROMETRIC PROFILOMETER

被引：175

作者：

SCHWIDER, J

ZHOU, L

机构：

[1] Lehrstuhl Angewandte Optik, Physikalisches Institut Universität Erlangen-Nürnberg, Erlangen, 91058

来源：

OPTICS LETTERS | 1994年 / 19卷 / 13期

关键词：

D O I：

10.1364/OL.19.000995

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

The usual automated interferometric profilometers suffer from phase-unwrapping problems. We discuss a one-dimensional method for the absolute determination of the path difference in interferometers to obtain unique surface profiles with high accuracy.

引用

页码：995 / 997

页数：3

共 16 条

[1]

BECKER P, 1993, PHYS UNSERER ZEIT, V24, P246

[2] MULTIPLE-WAVELENGTH PHASE-SHIFTING INTERFEROMETRY [J].

CHENG, YY ;

WYANT, JC .

APPLIED OPTICS, 1985, 24 (06) :804-807

[3] 3-DIMENSIONAL IMAGING BY SUB-NYQUIST SAMPLING OF WHITE-LIGHT INTERFEROGRAMS [J].

DEGROOT, P ;

DECK, L .

OPTICS LETTERS, 1993, 18 (17) :1462-1464

[4]

GEHRCKE E, 1926, HDB PHYSIKALISCHEN O, P408

[5]

HUANG CC, 1983, P SOC PHOTO-OPT INST, V429, P65, DOI 10.1117/12.936341

[6] SYNTHETIC-HOLOGRAMS WRITTEN BY A LASER PATTERN GENERATOR [J].

KRACKHARDT, U ;

SCHWIDER, J ;

SCHRADER, M ;

STREIBL, N .

OPTICAL ENGINEERING, 1993, 32 (04) :781-785

[7]

KRUG W, 1961, BEITRAGE INTERFERE 2, P175

[8]

KRUG W, 1961, BEITRAGE INTERFERE 1, P79

[9]

LONGHURST RS, 1984, GEOMETRICAL PHYSICAL, P203

[10]

LUMMER O, 1926, MULLERPOUILLETS LEHR, V2, P782

← 1 2 →