Novel transparent hybrid polymer working stamp for UV-imprinting

被引：31

作者：

Klukowska, Anna ^{[1
]}

Kolander, Anett ^{[1
]}

Bergmair, Iris ^{[2
]}

Muehlberger, Michael ^{[2
]}

Leichtfried, Hannes ^{[2
]}

Reuther, Freimut ^{[1
]}

Gruetzner, Gabi ^{[1
]}

Schoeftner, Rainer ^{[2
]}

机构：

[1] Micro Resist Technol GmbH, D-12555 Berlin, Germany

[2] Profactor GmbH, A-4407 Steyr, Austria

来源：

MICROELECTRONIC ENGINEERING | 2009年 / 86卷 / 4-6期

关键词：

Nanoimprint; Nano-stamp; Hybrid polymer; Working stamps durability; LITHOGRAPHY;

D O I：

10.1016/j.mee.2008.12.088

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Transparent stamps are an integral and crucial part of the UV-imprinting. Time consuming fabrication of quartz stamps increases the price of the technology. In the presented work a thermally stable transparent imprint stamp made of a novel hybrid polymer system is demonstrated. As a low-cost and highly efficient alternative the hybrid polymer stamp contributes to the acceptance and application of the nanoimprint technology. By using the UV-patternable inorganic-organic hybrid polymer quartz stamps might become superfluous in the UV-imprint process entirely, because transparent working stamps can be manufactured also with use of opaque silicon master stamps. (C) 2009 Elsevier B.V. All rights reserved.

引用

页码：697 / 699

页数：3

共 4 条

[1] Improving stamps for 10 nm level wafer scale nanoimprint lithography [J].

Beck, M ;

Graczyk, M ;

Maximov, I ;

Sarwe, EL ;

Ling, TGI ;

Keil, M ;

Montelius, L .

MICROELECTRONIC ENGINEERING, 2002, 61-2 :441-448

[2] High resolution lithography with PDMS molds [J].

Bender, M ;

Plachetka, U ;

Ran, J ;

Fuchs, A ;

Vratzov, B ;

Kurz, H ;

Glinsner, T ;

Lindner, F .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2004, 22 (06) :3229-3232

[3]

KLUKOWSKA A, 1992, SPIE P, V6792

[4] Applications of hybrid organic-inorganic nanocomposites [J].

Sanchez, C ;

Julián, B ;

Belleville, P ;

Popall, M .

JOURNAL OF MATERIALS CHEMISTRY, 2005, 15 (35-36) :3559-3592

← 1 →