Nano-mechanical tuning and imaging of a photonic crystal micro-cavity resonance

被引：54

作者：

Hopman, W. C. L.

Hollink, A. J. F.

de Ridder, R. M.

van der Werf, K. O.

Subramaniam, V.

Bogaerts, W.

机构：

[1] Univ Twente, Fac Elect Engn Math & Comp Sci, Mesa Inst Nanotechnol, NL-7500 AE Enschede, Netherlands

[2] Univ Twente, Fac Sci & Technol, Mesa Inst Nanotechnol, NL-7500 AE Enschede, Netherlands

[3] Univ Ghent, IMEC, Dept Informat Technol, B-9000 Ghent, Belgium

来源：

OPTICS EXPRESS | 2006年 / 14卷 / 19期

关键词：

D O I：

10.1364/OE.14.008745

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

We show that nano-mechanical interaction using atomic force microscopy (AFM) can be used to map out mode-patterns of an optical micro-resonator with high spatial accuracy. Furthermore we demonstrate how the Q-factor and center wavelength of such resonances can be sensitively modified by both horizontal and vertical displacement of an AFM tip consisting of either Si3N4 or Si material. With a silicon tip we are able to tune the resonance wavelength by 2.3 nm, and to set Q between values of 615 and zero, by expedient positioning of the AFM tip. We find full on/off switching for less than 100 nm vertical, and for 500 nm lateral displacement at the strongest resonance antinode locations. (c) 2006 Optical Society of America

引用

收藏

页码：8745 / 8752

页数：8

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