共 61 条
- [1] A technical comparison of micro-electrodischarge machining, microdrilling and copper vapour laser machining for the fabrication of ink jet nozzles [J]. DESIGN, TEST, INTEGRATION, AND PACKAGING OF MEMS/MOEMS, PROCEEDINGS, 2000, 4019 : 531 - 540
- [2] Typical metrology of micro-hole arrays made in stainless steel foils by two-stage micro-EDM [J]. CIRP ANNALS 1999 - MANUFACTURING TECHNOLOGY, 1999, : 127 - 130
- [3] A positional accuracy study of a micro-EDM machine [J]. DESIGN, TEST, AND MICROFABRICATION OF MEMS AND MOEMS, PTS 1 AND 2, 1999, 3680 : 1113 - 1124
- [4] [Anonymous], 1987, ANN CIRP, DOI DOI 10.1016/S0007-8506(07)60751-3
- [5] [Anonymous], 1975, ELECT DEVICES M
- [7] BASTING D, 2001, EXCIMER LASER TECHNO
- [8] BOSMAN J, THESIS U TWENTE
- [9] Burnett JH, 2001, PHOTON SPECTRA, V35, P88