Ferroelectric nanotubes fabricated using nanowires as positive templates

被引:65
作者
Alexe, M. [1 ]
Hesse, D. [1 ]
Schmidt, V. [1 ]
Senz, S. [1 ]
Fan, H. J. [1 ]
Zacharias, M. [1 ]
Goesele, U. [1 ]
机构
[1] Max Planck Inst Microstruct Phys, D-06120 Halle, Germany
关键词
D O I
10.1063/1.2364260
中图分类号
O59 [应用物理学];
学科分类号
摘要
The authors report on fabrication and electrical characterization of ferroelectric nanotubes and metal-ferroelectric-metal composite nanotubes using silicon and ZnO nanowires as positive templates. Nanotubes of high aspect ratio with a minimum inner diameter of about 100 nm and a length ranging from 0.5 mu m to a few microns have been obtained by magnetron sputtering and/or pulsed laser deposition. Metal-ferroelectric one-dimensional structures were characterized by piezoelectric scanning probe microscopy, showing piezoelectric hysteresis loops and ferroelectric switching. The presented fabrication approach can be used to fabricate three-dimensional capacitors for ferroelectric nonvolatile memories as well as nanosize piezoelectric scanners and actuators. (c) 2006 American Institute of Physics.
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页数:3
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