High-yield selective placement of carbon nanotubes on pre-patterned electrodes

被引：69

作者：

Lewenstein, JC

Burgin, TP

Ribayrol, A

Nagahara, LA

Tsui, RK

机构：

[1] Motorola Labs, Phys Sci Res Labs, Tempe, AZ 85284 USA

[2] Espace Technol, F-91193 Gif Sur Yvette, France

来源：

NANO LETTERS | 2002年 / 2卷 / 05期

关键词：

D O I：

10.1021/nl015690z

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

Practical utilization of carbon nanotubes (CNTs) in nanoscale devices requires their directed placement on a substrate. Controlled placement has been achieved by a combination of the highly selective adsorption of single walled CNTs (SWNTs) onto open regions of amino-functionalized SiO2 in a polymeric resist, followed by liftoff. Careful selection of the surfactant used to suspend the SWNTs as well as other processing parameters allow controlled placement in high yield. This technique may provide a path for the large-scale fabrication of CNT-based devices and circuits.

引用

页码：443 / 446

页数：4

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