Erasable nanometer-scale modification at the Au/Si interface by ballistic electron emission microscopy

被引:6
作者
Hasegawa, Y
Akiyama, K
Ono, M
Kahng, SJ
Xue, QK
Nakayama, K
Hashizume, T
Sakurai, T
机构
[1] Tohoku Univ, Inst Mat Res, Aoba Ku, Sendai, Miyagi 9808577, Japan
[2] Hitachi Ltd, Adv Res Lab, Hatoyama, Saitama 3500395, Japan
[3] Seoul Natl Univ, Dept Phys, Seoul 151742, South Korea
关键词
D O I
10.1063/1.125423
中图分类号
O59 [应用物理学];
学科分类号
摘要
We report that local modification and its erasing with a nanometer-scale size can be performed at a Au/Si(111) interface using ballistic electron emission microscopy (BEEM). By applying a negative voltage on the tip, a region was created where no BEEM current flows at the interface and was imaged with BEEM. The modified area can be erased by applying a voltage with the opposite polarity. It is found that the minimum size of writing and erasing corresponds to Au grains, suggesting a method of rewritable memory on a nanometer-scale dimension. (C) 1999 American Institute of Physics. [S0003-6951(99)02849-1].
引用
收藏
页码:3668 / 3670
页数:3
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