Elastic properties of TiN hard films at room and high temperatures using Brillouin scattering

被引：16

作者：

Pang, W ^{[1
]}

Stoddart, PR ^{[1
]}

Comins, JD ^{[1
]}

Every, AG ^{[1
]}

Pietersen, D ^{[1
]}

Marais, PJ ^{[1
]}

机构：

[1] ATOM ENERGY CORP S AFRICA LTD,ZA-0001 PRETORIA,SOUTH AFRICA

来源：

INTERNATIONAL JOURNAL OF REFRACTORY METALS & HARD MATERIALS | 1997年 / 15卷 / 1-3期

关键词：

D O I：

10.1016/S0263-4368(96)00037-6

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The dispersion relation of surface acoustic waves (SAW) in TiN hard films of various thicknesses on high speed steel (HSS) is studied using Brillouin scattering. The results are interpreted on the basis of a model for supported layer modes which is based on the elastic properties of the two media and the boundary conditions at the interface and free surface. Good agreement is obtained between theory and experiment for thick layers (greater than or equal to 0.89 mu m) and for the substrate alone. High temperature measurements on a 4.18 mu m coated sample up to 600 degrees C are reported. (C) 1997 Elsevier Science Limited.

引用

页码：179 / 185

页数：7

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