ELASTIC-CONSTANTS AND HARDNESS OF ION-BEAM-SPUTTERED TINX FILMS MEASURED BY BRILLOUIN-SCATTERING AND DEPTH-SENSING INDENTATION

被引：87

作者：

JIANG, X ^{[1
]}

WANG, M ^{[1
]}

SCHMIDT, K ^{[1
]}

DUNLOP, E ^{[1
]}

HAUPT, J ^{[1
]}

GISSLER, W ^{[1
]}

机构：

[1] COMMISS EUROPEAN COMMUNITIES,JOINT RES CTR,INST ADV MAT,I-21020 ISPRA,ITALY

来源：

JOURNAL OF APPLIED PHYSICS | 1991年 / 69卷 / 05期

关键词：

D O I：

10.1063/1.348963

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

TiN(x) films of various composition have been prepared by reactive-ion-beam sputtering at a deposition temperature of 50-degrees-C. Young's modulus E and hardness H of these films were measured by a depth-sensing nanoindentation technique, whereas the shear modulus G was obtained by a measurement of the velocity of the acoustic surface wave by Brillouin light scattering. The study was extended over a wide range of stoichiometries, 0 less-than-or-equal-to x less-than-or-equal-to 0.8. A proportionality between E and H has been observed.

引用

页码：3053 / 3057

页数：5

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