共 18 条
[1]
BEHNKEN H, 1987, HART TECH MITT, V42, P17
[2]
INFLUENCE OF COMPOSITION AND PROCESS PARAMETERS ON THE INTERNAL-STRESS OF THE CARBIDES OF TUNGSTEN, CHROMIUM, AND TITANIUM
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS,
1987, 5 (01)
:70-74
[3]
STRESS AND RESISTIVITY CONTROL IN SPUTTERED MOLYBDENUM FILMS AND COMPARISON WITH SPUTTERED GOLD
[J].
METALLURGICAL TRANSACTIONS,
1971, 2 (03)
:699-&
[4]
Hauk V., 1982, EIGENSPANNUNGEN LAST
[5]
HIRSCH T, 1988, HARTEREITECH MITTEIL, V4, P212
[6]
HOFFMAN RW, 1975, NATO ADV STUDY I B, V14
[7]
KAMACHI K, 1986, SURF J INT, V1, P82
[8]
BIAS-INDUCED STRESS TRANSITIONS IN SPUTTERED TIN FILMS
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS,
1986, 4 (04)
:1850-1854
[9]
KOPACZ U, 1984, MPIW5 ARBEITS BERICH
[10]
Muller P., 1961, Z ANGEW PHYS, V13, P305