THE HARDNESS AND YOUNG MODULUS OF AMORPHOUS HYDROGENATED CARBON AND SILICON FILMS MEASURED WITH AN ULTRALOW LOAD INDENTER

被引：125

作者：

JIANG, X

REICHELT, K

STRITZKER, B

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1989年 / 66卷 / 12期

关键词：

D O I：

10.1063/1.344462

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：5805 / 5808

页数：4

共 11 条

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