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THE EFFECT OF HEAVY-ION BOMBARDMENT ON THE PROPERTIES OF HARD A-C-H(I-C) FILMS
被引:42
作者
:
ZOU, JW
论文数:
0
引用数:
0
h-index:
0
ZOU, JW
SCHMIDT, K
论文数:
0
引用数:
0
h-index:
0
SCHMIDT, K
REICHELT, K
论文数:
0
引用数:
0
h-index:
0
REICHELT, K
STRITZKER, B
论文数:
0
引用数:
0
h-index:
0
STRITZKER, B
机构
:
来源
:
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
|
1988年
/ 6卷
/ 06期
关键词
:
D O I
:
10.1116/1.575481
中图分类号
:
TB3 [工程材料学];
学科分类号
:
0805 ;
080502 ;
摘要
:
引用
收藏
页码:3103 / 3104
页数:2
相关论文
共 8 条
[1]
ION-BEAM DEPOSITION OF THIN FILMS OF DIAMONDLIKE CARBON
AISENBERG, S
论文数:
0
引用数:
0
h-index:
0
AISENBERG, S
CHABOT, R
论文数:
0
引用数:
0
h-index:
0
CHABOT, R
[J].
JOURNAL OF APPLIED PHYSICS,
1971,
42
(07)
: 2953
-
+
[2]
RF-PLASMA DEPOSITED AMORPHOUS HYDROGENATED HARD CARBON THIN-FILMS - PREPARATION, PROPERTIES, AND APPLICATIONS
BUBENZER, A
论文数:
0
引用数:
0
h-index:
0
BUBENZER, A
DISCHLER, B
论文数:
0
引用数:
0
h-index:
0
DISCHLER, B
BRANDT, G
论文数:
0
引用数:
0
h-index:
0
BRANDT, G
KOIDL, P
论文数:
0
引用数:
0
h-index:
0
KOIDL, P
[J].
JOURNAL OF APPLIED PHYSICS,
1983,
54
(08)
: 4590
-
4595
[3]
BONDING IN HYDROGENATED HARD CARBON STUDIED BY OPTICAL SPECTROSCOPY
DISCHLER, B
论文数:
0
引用数:
0
h-index:
0
DISCHLER, B
BUBENZER, A
论文数:
0
引用数:
0
h-index:
0
BUBENZER, A
KOIDL, P
论文数:
0
引用数:
0
h-index:
0
KOIDL, P
[J].
SOLID STATE COMMUNICATIONS,
1983,
48
(02)
: 105
-
108
[4]
SOME NEW RESULTS ON THE FABRICATION OF AND THE MECHANICAL, ELECTRICAL AND OPTICAL-PROPERTIES OF I-CARBON LAYERS
ENKE, K
论文数:
0
引用数:
0
h-index:
0
ENKE, K
[J].
THIN SOLID FILMS,
1981,
80
(1-3)
: 227
-
234
[5]
COMPRESSIVE STRESS OF THIN CUBIC BN FILMS PREPARED BY R.F. REACTIVE SPUTTERING ON R.F.-BIASED SUBSTRATES
GORANCHEV, B
论文数:
0
引用数:
0
h-index:
0
GORANCHEV, B
SCHMIDT, K
论文数:
0
引用数:
0
h-index:
0
SCHMIDT, K
REICHELT, K
论文数:
0
引用数:
0
h-index:
0
REICHELT, K
[J].
THIN SOLID FILMS,
1987,
149
(01)
: L77
-
L80
[6]
MORI T, 1984, J APPL PHYS, V55, P3276, DOI 10.1063/1.333385
[7]
STRUCTURE AND PROPERTIES OF QUASI-AMORPHOUS FILMS PREPARED BY ION-BEAM TECHNIQUES
WEISSMANTEL, C
论文数:
0
引用数:
0
h-index:
0
WEISSMANTEL, C
BEWILOGUA, K
论文数:
0
引用数:
0
h-index:
0
BEWILOGUA, K
DIETRICH, D
论文数:
0
引用数:
0
h-index:
0
DIETRICH, D
ERLER, HJ
论文数:
0
引用数:
0
h-index:
0
ERLER, HJ
HINNEBERG, HJ
论文数:
0
引用数:
0
h-index:
0
HINNEBERG, HJ
KLOSE, S
论文数:
0
引用数:
0
h-index:
0
KLOSE, S
NOWICK, W
论文数:
0
引用数:
0
h-index:
0
NOWICK, W
REISSE, G
论文数:
0
引用数:
0
h-index:
0
REISSE, G
[J].
THIN SOLID FILMS,
1980,
72
(01)
: 19
-
31
[8]
LOW-STRESS DIAMONDLIKE CARBON-FILMS
ZELEZ, J
论文数:
0
引用数:
0
h-index:
0
ZELEZ, J
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS,
1983,
1
(02):
: 305
-
307
←
1
→
共 8 条
[1]
ION-BEAM DEPOSITION OF THIN FILMS OF DIAMONDLIKE CARBON
AISENBERG, S
论文数:
0
引用数:
0
h-index:
0
AISENBERG, S
CHABOT, R
论文数:
0
引用数:
0
h-index:
0
CHABOT, R
[J].
JOURNAL OF APPLIED PHYSICS,
1971,
42
(07)
: 2953
-
+
[2]
RF-PLASMA DEPOSITED AMORPHOUS HYDROGENATED HARD CARBON THIN-FILMS - PREPARATION, PROPERTIES, AND APPLICATIONS
BUBENZER, A
论文数:
0
引用数:
0
h-index:
0
BUBENZER, A
DISCHLER, B
论文数:
0
引用数:
0
h-index:
0
DISCHLER, B
BRANDT, G
论文数:
0
引用数:
0
h-index:
0
BRANDT, G
KOIDL, P
论文数:
0
引用数:
0
h-index:
0
KOIDL, P
[J].
JOURNAL OF APPLIED PHYSICS,
1983,
54
(08)
: 4590
-
4595
[3]
BONDING IN HYDROGENATED HARD CARBON STUDIED BY OPTICAL SPECTROSCOPY
DISCHLER, B
论文数:
0
引用数:
0
h-index:
0
DISCHLER, B
BUBENZER, A
论文数:
0
引用数:
0
h-index:
0
BUBENZER, A
KOIDL, P
论文数:
0
引用数:
0
h-index:
0
KOIDL, P
[J].
SOLID STATE COMMUNICATIONS,
1983,
48
(02)
: 105
-
108
[4]
SOME NEW RESULTS ON THE FABRICATION OF AND THE MECHANICAL, ELECTRICAL AND OPTICAL-PROPERTIES OF I-CARBON LAYERS
ENKE, K
论文数:
0
引用数:
0
h-index:
0
ENKE, K
[J].
THIN SOLID FILMS,
1981,
80
(1-3)
: 227
-
234
[5]
COMPRESSIVE STRESS OF THIN CUBIC BN FILMS PREPARED BY R.F. REACTIVE SPUTTERING ON R.F.-BIASED SUBSTRATES
GORANCHEV, B
论文数:
0
引用数:
0
h-index:
0
GORANCHEV, B
SCHMIDT, K
论文数:
0
引用数:
0
h-index:
0
SCHMIDT, K
REICHELT, K
论文数:
0
引用数:
0
h-index:
0
REICHELT, K
[J].
THIN SOLID FILMS,
1987,
149
(01)
: L77
-
L80
[6]
MORI T, 1984, J APPL PHYS, V55, P3276, DOI 10.1063/1.333385
[7]
STRUCTURE AND PROPERTIES OF QUASI-AMORPHOUS FILMS PREPARED BY ION-BEAM TECHNIQUES
WEISSMANTEL, C
论文数:
0
引用数:
0
h-index:
0
WEISSMANTEL, C
BEWILOGUA, K
论文数:
0
引用数:
0
h-index:
0
BEWILOGUA, K
DIETRICH, D
论文数:
0
引用数:
0
h-index:
0
DIETRICH, D
ERLER, HJ
论文数:
0
引用数:
0
h-index:
0
ERLER, HJ
HINNEBERG, HJ
论文数:
0
引用数:
0
h-index:
0
HINNEBERG, HJ
KLOSE, S
论文数:
0
引用数:
0
h-index:
0
KLOSE, S
NOWICK, W
论文数:
0
引用数:
0
h-index:
0
NOWICK, W
REISSE, G
论文数:
0
引用数:
0
h-index:
0
REISSE, G
[J].
THIN SOLID FILMS,
1980,
72
(01)
: 19
-
31
[8]
LOW-STRESS DIAMONDLIKE CARBON-FILMS
ZELEZ, J
论文数:
0
引用数:
0
h-index:
0
ZELEZ, J
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS,
1983,
1
(02):
: 305
-
307
←
1
→