Annealing effect for structural morphology of ZnO film on SiO2 substrates

被引：71

作者：

Kim, HW ^{[1
]}

Kim, NH ^{[1
]}

机构：

[1] Inha Univ, Sch Mat Sci & Engn, Inchon 402751, South Korea

来源：

MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING | 2004年 / 7卷 / 1-2期

关键词：

thin films; sputtering; structural properties;

D O I：

10.1016/j.mssp.2003.12.001

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We have investigated the effect of annealing temperature on the structural morphology of ZnO thin films deposited on SiO2 substrate by the RF magnetron sputtering method. We have used X-ray diffraction, scanning electron microscopy, and atomic force microscopy and have revealed that the grain size and surface roughness tends to increase and the c-axis orientation of ZnO thin film is enhanced by increasing the annealing temperature. (C) 2004 Elsevier Ltd. All rights reserved.

引用

页码：1 / 6

页数：6

共 21 条

[1] Growth of pure ZnO thin films prepared by chemical spray pyrolysis on silicon [J].

Ayouchi, R ;

Martin, F ;

Leinen, D ;

Ramos-Barrado, JR .

JOURNAL OF CRYSTAL GROWTH, 2003, 247 (3-4) :497-504

[2]

Cullity BD, 1978, ELEMENTS XRAY DIFFRA

[3] CONTROL OF PREFERRED ORIENTATION FOR ZNOX FILMS - CONTROL OF SELF-TEXTURE [J].

FUJIMURA, N ;

NISHIHARA, T ;

GOTO, S ;

XU, JF ;

ITO, T .

JOURNAL OF CRYSTAL GROWTH, 1993, 130 (1-2) :269-279

[4] Properties of ZnO thin films prepared by reactive evaporation [J].

Gordillo, G ;

Calderón, C .

SOLAR ENERGY MATERIALS AND SOLAR CELLS, 2001, 69 (03) :251-260

[5] Multicolored light emitters on silicon substrates [J].

Guha, S ;

Bojarczuk, NA .

APPLIED PHYSICS LETTERS, 1998, 73 (11) :1487-1489

[6] ZnO growth on Si by radical source MBE [J].

Iwata, K ;

Fons, P ;

Niki, S ;

Yamada, A ;

Matsubara, K ;

Nakahara, K ;

Tanabe, T ;

Takasu, H .

JOURNAL OF CRYSTAL GROWTH, 2000, 214 :50-54

[7] Epitaxial growth of Al-doped ZnO thin films grown by pulsed laser deposition [J].

Kim, H ;

Horwitz, JS ;

Qadri, SB ;

Chrisey, DB .

THIN SOLID FILMS, 2002, 420 :107-111

[8] Electrical and optical properties of ZnO transparent conducting films by the sol-gel method [J].

Lee, JH ;

Ko, KH ;

Park, BO .

JOURNAL OF CRYSTAL GROWTH, 2003, 247 (1-2) :119-125

[9] Effects of RF power on properties of ZnO thin films grown on Si(001) substrate by plasma enhanced chemical vapor deposition [J].

Li, BS ;

Liu, YC ;

Shen, DZ ;

Zhang, JY ;

Lu, YM ;

Fan, XW .

JOURNAL OF CRYSTAL GROWTH, 2003, 249 (1-2) :179-185

[10] Deposition of highly oriented ZnO films by spray pyrolysis and their structural, optical and electrical characterization [J].

Lokhande, BJ ;

Patil, PS ;

Uplane, MD .

MATERIALS LETTERS, 2002, 57 (03) :573-579

← 1 2 3 →