Fabrication by electron beam induced deposition and transmission electron microscopic characterization of sub-10-nm freestanding Pt nanowires

被引:71
作者
Frabboni, S.
Gazzadi, G. C.
Felisari, L.
Spessot, A.
机构
[1] Univ Modena & Reggio Emilia, CNR, INFM S3, I-41100 Modena, Italy
[2] Univ Modena & Reggio Emilia, Dept Phys, I-41100 Modena, Italy
关键词
D O I
10.1063/1.2206996
中图分类号
O59 [应用物理学];
学科分类号
摘要
We present a method to reduce the size and improve the crystal quality of freestanding nanowires grown by electron beam induced deposition from a platinum metal organic precursor in a dual beam system. By freestanding horizontal growth and subsequent electron irradiation in a transmission electron microscope, sub-10-nm polycrystalline platinum nanowires have been obtained. A combined transmission electron microscopy-electron energy loss analysis has shown that the amorphous carbon, mixed to nanocrystalline platinum in the as-deposited material, is removed from the wires during irradiation. The same treatment progressively transforms nanocrystals dispersed in the amorphous matrix in a continuous polycrystalline platinum wire. (c) 2006 American Institute of Physics.
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页数:3
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共 25 条
[21]   The role of secondary electrons in electron-beam-induced-deposition spatial resolution [J].
Silvis-Cividjian, N ;
Hagen, CW ;
Leunissen, LHA ;
Kruit, P .
MICROELECTRONIC ENGINEERING, 2002, 61-2 :693-699
[22]   Cross section investigations of compositions and sub-structures of tips obtained by focused electron beam induced deposition [J].
Utke, I ;
Michler, J ;
Gasser, P ;
Santschi, C ;
Laub, D ;
Cantoni, M ;
Buffat, PA ;
Jiao, C ;
Hoffmann, P .
ADVANCED ENGINEERING MATERIALS, 2005, 7 (05) :323-331
[23]  
Wang ZL., 2003, Nanowires and Nanobelts, Materials, VI.
[24]   Fabrication of large number density platinum nanowire arrays by size reduction lithography and nanoimprint lithography [J].
Yan, XM ;
Kwon, S ;
Contreras, AM ;
Bokor, J ;
Somorjai, GA .
NANO LETTERS, 2005, 5 (04) :745-748
[25]   Molybdenum nanowires by electrodeposition [J].
Zach, MP ;
Ng, KH ;
Penner, RM .
SCIENCE, 2000, 290 (5499) :2120-2123