The controlled growth of GaN nanowires

被引:514
作者
Hersee, Stephen D. [1 ]
Sun, Xinyu
Wang, Xin
机构
[1] Univ New Mexico, Ctr High Technol Mat, Albuquerque, NM 87106 USA
[2] Univ New Mexico, Dept Elect & Comp Engn, Albuquerque, NM 87106 USA
关键词
D O I
10.1021/nl060553t
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
This paper reports a scalable process for the growth of high-quality GaN nanowires and uniform nanowire arrays in which the position and diameter of each nanowire is precisely controlled. The approach is based on conventional metalorganic chemical vapor deposition using regular precursors and requires no additional metal catalyst. The location, orientation, and diameter of each GaN nanowire are controlled using a thin, selective growth mask that is patterned by interferometric lithography. It was found that use of a pulsed MOCVD process allowed the nanowire diameter to remain constant after the nanowires had emerged from the selective growth mask. Vertical GaN nanowire growth rates in excess of 2 mu m/h were measured, while remarkably the diameter of each nanowire remained constant over the entire (micrometer) length of the nanowires. The paper reports transmission electron microscopy and photoluminescence data.
引用
收藏
页码:1808 / 1811
页数:4
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