SMART - a program to measure SEM resolution and imaging performance

被引:78
作者
Joy, DC [1 ]
机构
[1] Univ Tennessee, EM Facil, Knoxville, TN 37996 USA
[2] Oak Ridge Natl Lab, Oak Ridge, TN 37831 USA
关键词
Fourier transform; scanning electron microscope; resolution; signal-to-noise; probe size;
D O I
10.1046/j.1365-2818.2002.01062.x
中图分类号
TH742 [显微镜];
学科分类号
摘要
It is important to be able to measure the parameters, such as spatial resolution, astigmastism, signal-to-noise ratio, and drift and instability, that characterize the performance of a scanning electron microscope. These quantities can be determined most reliably by a Fourier analysis of digital micrographs from the instrument, recorded under conditions of interest. A program designed to implement all of the necessary steps in an automated manner has been developed as a 'macro' for the popular, and freely available, NIH Image and SCION Image programs.
引用
收藏
页码:24 / 34
页数:11
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