共 21 条
[2]
DODSON TA, 1990, P 12 INT C EL MICR, V1, P406
[3]
ERASMUS SJ, 1980, I PHYS C SER, V52, P73
[5]
FRANK J, 1970, BERICH BUNSEN GESELL, V74, P1105
[6]
Frank J, 1980, COMPUTER PROCESSING, P187
[7]
GOLDSTEIN JI, 1992, PRACTICAL SCANNING E
[8]
Joy DC, 1996, SCANNING, V18, P533, DOI 10.1002/sca.4950180802
[9]
JOY DC, 1974, P 7 SEM S IITRI CHIC, P327
[10]
QUANTITATIVE-ANALYSIS OF RESOLUTION AND STABILITY IN NANOMETER ELECTRON-BEAM LITHOGRAPHY
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,
1988, 6 (06)
:2074-2079