Investigation of forward and reverse current conduction in GaN films by conductive atomic force microscopy

被引:57
作者
Spradlin, J
Dogan, S
Xie, J
Molnar, R
Baski, AA [1 ]
Morkoç, H
机构
[1] Virginia Commonwealth Univ, Dept Elect Engn, Richmond, VA 23284 USA
[2] Virginia Commonwealth Univ, Dept Phys, Richmond, VA 23284 USA
[3] Ataturk Univ, Dept Phys, TR-25240 Erzurum, Turkey
关键词
D O I
10.1063/1.1751609
中图分类号
O59 [应用物理学];
学科分类号
摘要
We have used conductive atomic force microscopy (C-AFM) to investigate the forward and reverse bias current conduction of homo- and heteroepitaxial GaN-based films grown by molecular beam epitaxy. In the case of homoepitaxy, C-AFM shows enhanced current conduction at the centers of similar to30% of spiral hillocks, which are associated with screw dislocations. Local current-voltage spectra taken by C-AFM on and off such hillocks indicate Frenkel-Poole and field emission mechanisms, respectively, for low current levels in forward conduction. In the case of heteroepitaxial GaN films grown on sapphire, the correlation between conduction pathways and topography is more complex. We do observe, however, that films with more rectifying nominal Schottky behavior (less reverse leakage current) produce forward and reverse bias C-AFM images with strong asymmetry. (C) 2004 American Institute of Physics.
引用
收藏
页码:4150 / 4152
页数:3
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