Light coupling and distribution for Si3N4/SiO2 integrated multichannel single-mode sensing system

被引：21

作者：

Kazmierczak, Andrzej ^{[1
]}

Dortu, Fabian ^{[1
]}

Schrevens, Olivier ^{[1
]}

Giannone, Domenico ^{[1
]}

Vivien, Laurent ^{[2
]}

Marris-Morini, Delphine ^{[2
]}

Bouville, David ^{[2
]}

Cassan, Eric ^{[2
]}

Gylfason, Kristinn B. ^{[3
]}

Sohlstrom, Hans ^{[3
]}

Sanchez, Benito ^{[4
]}

Griol, Amadeu ^{[4
]}

Hill, Daniel ^{[4
]}

机构：

[1] Multitel Asbl, B-7000 Mons, Belgium

[2] Univ Paris 11, CNRS UMR 8622, Inst Elect Fondamentale, F-91405 Orsay, France

[3] KTH Royal Inst Technol, Sch Elect Engn, Microsyst Technol Lab, SE-10044 Stockholm, Sweden

[4] Univ Politecn Valencia, Nanophoton Technol Ctr, Valencia 46022, Spain

来源：

OPTICAL ENGINEERING | 2009年 / 48卷 / 01期

关键词：

optical systems; integrated optics; sensors; waveguides; WAVE-GUIDE; BIOCHEMICAL SENSOR; GRATING COUPLERS; MICROWAVEGUIDES; RESONATOR; SPLITTER;

D O I：

10.1117/1.3067875

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

We present an efficient and highly alignment-tolerant light coupling and distribution system for a multichannel Si3N4/SiO2 single-mode photonics sensing chip. The design of the input and output couplers and the distribution splitters is discussed. Examples of multichannel data obtained with the system are given. (C) 2009 Society of Photo-Optical Instrumentation Engineers. [DOI: 10.1117/1.3067875]

引用

页数：10

共 25 条

[1] Slot-waveguide biochemical sensor [J].