Correlation of Raman spectra with carbon ion energy for amorphous diamond-like films produced with a mass-separated ion beam

被引:13
作者
Khriachtchev, LY [1 ]
Hakovirta, M [1 ]
Lappalainen, R [1 ]
Rasanen, M [1 ]
机构
[1] HELSINKI UNIV,CHEM PHYS LAB,FIN-00014 HELSINKI,FINLAND
关键词
D O I
10.1016/0375-9601(96)00346-5
中图分类号
O4 [物理学];
学科分类号
0702 ;
摘要
The Raman spectra of hydrogen-free amorphous diamond-like films prepared using a mass-separated carbon ion beam and different deposition energies are investigated. The correlation between the numerical parameters of the Raman spectra in the 100 to 2100 cm(-1) range and the deposition energy, and consequently the sp(3) fraction, is demonstrated.
引用
收藏
页码:354 / 358
页数:5
相关论文
共 18 条
  • [1] BASCA WS, 1993, PHYS REV B, V47, P10931
  • [2] THEORY OF DIAMOND-LIKE AMORPHOUS-CARBON
    DRABOLD, DA
    FEDDERS, PA
    STUMM, P
    [J]. PHYSICAL REVIEW B, 1994, 49 (23): : 16415 - 16422
  • [3] NEUTRON-SCATTERING STUDIES OF THE STRUCTURE OF HIGHLY TETRAHEDRAL AMORPHOUS DIAMOND-LIKE CARBON
    GASKELL, PH
    SAEED, A
    CHIEUX, P
    MCKENZIE, DR
    [J]. PHYSICAL REVIEW LETTERS, 1991, 67 (10) : 1286 - 1289
  • [4] COMPARISON OF NEUTRON-SCATTERING DATA FOR TETRAHEDRAL AMORPHOUS-CARBON WITH STRUCTURAL MODELS
    GILKES, KWR
    GASKELL, PH
    ROBERTSON, J
    [J]. PHYSICAL REVIEW B, 1995, 51 (18): : 12303 - 12312
  • [5] CORRELATION OF CARBON ION ENERGY WITH SP(2)/SP(3) RATIO IN AMORPHOUS DIAMOND FILMS PRODUCED WITH A MASS-SEPARATED ION-BEAM
    HAKOVIRTA, M
    SALO, J
    LAPPALAINEN, R
    ANTTILA, A
    [J]. PHYSICS LETTERS A, 1995, 205 (04) : 287 - 289
  • [6] MOLECULAR-DYNAMICS SIMULATION OF THE GROWTH OF DIAMOND-LIKE FILMS BY ENERGETIC CARBON-ATOM BEAMS
    KAUKONEN, HP
    NIEMINEN, RM
    [J]. PHYSICAL REVIEW LETTERS, 1992, 68 (05) : 620 - 623
  • [7] KHRIACHTCHEV LY, 1996, IN PRESS J APPL PHYS
  • [8] MODELING THE ION ENERGY-DEPENDENCE OF THE SP(3)/SP(2) BONDING RATIO IN AMORPHOUS DIAMOND-LIKE FILMS PRODUCED WITH A MASS-SEPARATED ION-BEAM
    KOPONEN, I
    HAKOVIRTA, M
    LAPPALAINEN, R
    [J]. JOURNAL OF APPLIED PHYSICS, 1995, 78 (09) : 5837 - 5839
  • [9] GROWTH MECHANISMS OF DLC FILMS FROM C+ IONS - EXPERIMENTAL STUDIES
    LIFSHITZ, Y
    LEMPERT, GD
    GROSSMAN, E
    AVIGAL, I
    UZANSAGUY, C
    KALISH, R
    KULIK, J
    MARTON, D
    RABALAIS, JW
    [J]. DIAMOND AND RELATED MATERIALS, 1995, 4 (04) : 318 - 323
  • [10] SUBPLANTATION MODEL FOR FILM GROWTH FROM HYPERTHERMAL SPECIES - APPLICATION TO DIAMOND
    LIFSHITZ, Y
    KASI, SR
    RABALAIS, JW
    [J]. PHYSICAL REVIEW LETTERS, 1989, 62 (11) : 1290 - 1293