PDMS-based, magnetically actuated variable optical attenuators obtained by soft lithography and inkjet printing technologies

被引：11

作者：

de Pedro, S. ^{[1
]}

Cadarso, V. J. ^{[2
]}

Munoz-Berbel, X. ^{[1
]}

Plaza, J. A. ^{[1
]}

Sort, J. ^{[3
,4
]}

Brugger, J. ^{[2
]}

Buettgenbach, S. ^{[5
]}

Llobera, A. ^{[1
,5
]}

机构：

[1] Esfera UAB, CNM IMB CSIC, Bellaterra, Spain

[2] Ecole Polytech Fed Lausanne, Microsyst Lab, CH-1015 Lausanne, Switzerland

[3] UAB, ICREA, Barcelona, Spain

[4] UAB, Dept Phys, Barcelona, Spain

[5] Tech Univ Carolo Wilhelmina Braunschweig, Inst Mikrotech, Braunschweig, Germany

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 2014年 / 215卷

基金：

欧洲研究理事会;

关键词：

Variable optical attenuators; Magnetic actuation; Poly(dimethylsiloxane); Ferrofluids; Soft lithography; Inkjet printing technique; NANOPARTICLES;

D O I：

10.1016/j.sna.2014.01.021

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

080906 [电磁信息功能材料与结构]; 082806 [农业信息与电气工程];

摘要：

This paper reports and compares the implementation of magnetic variable optical attenuators (M-VOA) by two fabrication strategies. In the first case, a two-layer structure containing a non-doped polydimethylsiloxane (PDMS) layer on a magnetic PDMS (M-PDMS) layer is fabricated by soft lithography (SLT). M-PDMS is obtained by doping PDMS with different ferrofluid (FF) volumes. The second technology consists of selectively dispense FF microdroplets using the inkjet printing technique (UP) on a non-doped, non-cured PDMS structure, previously defined by SLT. In this second case, FF volumes are encapsulated inside the polymer matrix. The optical and mechanical properties of structures fabricated using both strategies and containing similar ferrofluid amounts are compared. (C) 2014 Elsevier B.V. All rights reserved.

引用

页码：30 / 35

页数：6

共 28 条

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