Optical emission spectroscopy of the nitrogen arc in an arc-heated beam source used for synthesis of carbon nitride films

被引：15

作者：

Xu, N ^{[1
]}

Du, YC ^{[1
]}

Ying, ZF ^{[1
]}

Ren, ZM ^{[1
]}

Li, FM ^{[1
]}

Lin, J ^{[1
]}

Ren, YZ ^{[1
]}

Zong, XF ^{[1
]}

机构：

[1] FUDAN UNIV,INST SCI MAT,SHANGHAI 200433,PEOPLES R CHINA

来源：

JOURNAL OF PHYSICS D-APPLIED PHYSICS | 1997年 / 30卷 / 09期

关键词：

D O I：

10.1088/0022-3727/30/9/012

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

An exhaustive study of optical emission from a nitrogen are produced by an are-heated beam source is reported. Atomic nitrogen emission lines in the spectral region provide unequivocal evidence that the are-heated beam source generates an appreciable flux of nitrogen atoms. Experimental results show that the ratio of [N] to N-2 increased as the are pressure decreased. it is believed that this is because of the reduced probability of recombination of [N] atoms. Using this are-heated beam source for pulsed laser deposition (PLD) film growth, we have synthesized carbon nitride and other nitride films with a high nitrogen content. AES and XPS results indicate that composition ratios ([N]/[C]) in the deposited films were between 0.2 and 0.6. It has been considered that [N] atoms, rather than N-2 molecules in the are, are the most likely species responsible for the synthesis of nitride films.

引用

页码：1370 / 1376

页数：7

共 25 条

[1] MORPHOLOGY OF TIN COATING PRODUCED BY LASER-ABLATION [J].