MORPHOLOGY OF TIN COATING PRODUCED BY LASER-ABLATION

被引：5

作者：

ALTSHULIN, S ^{[1
]}

ROSEN, A ^{[1
]}

ZAHAVI, J ^{[1
]}

机构：

[1] TECHNION,ISRAEL INST MET,HAIFA,ISRAEL

来源：

JOURNAL OF MATERIALS SCIENCE | 1993年 / 28卷 / 14期

关键词：

D O I：

10.1007/BF00353173

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The morphology of TiN thin films on a steel surface produced by the process of laser ablation has been investigated. The process involves material removal from a titanium target by means of an ultraviolet excimer pulse laser. Both the target and the steel substrate are in an ammonia atmosphere and therefore the titanium atoms react with the nitrogen under the influence of a laser-induced plasma, and the product, which is TiN, is deposited on the surface of the steel. The investigation revealed that at the beginning of the process the TiN film is uniform; however, with increasing number of pulses, small micrometre-sized particles begin to appear on the surface and after a large number of pulses all the surface is covered with these particles.

引用

页码：3749 / 3753

页数：5

共 17 条

[1]

ADAMS AE, 1984, LASER PROCESSING DIA, P269

[2]

ANDERATTA RW, 1982, APPL PHYS LETT, V40, P183

[3]

BOYER PK, 1982, APPL PHYS LETT, V40, P8

[4] GROWTH OF THIN-FILMS BY LASER-INDUCED EVAPORATION [J].