Characterization of (1120) textured ZnO films fabricated by RF magnetron sputtering

被引：28

作者：

Yanagitani, T ^{[1
]}

Tomohiro, S ^{[1
]}

Nohara, T ^{[1
]}

Matsukawa, M ^{[1
]}

Watanabe, Y ^{[1
]}

Otani, T ^{[1
]}

机构：

[1] Doshisha Univ, Fac Engn, Kyotanabe, Kyoto 6100321, Japan

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 2004年 / 43卷 / 5B期

关键词：

(1120) textured ZnO film; shear wave transducer; Brillouin scattering method; RF magnetron sputtering; pole figure analysis;

D O I：

10.1143/JJAP.43.3004

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Using a conventional RF magnetron sputtering system, we have obtained two types of ZnO films on various kinds of substrate. One is a film with the c-axes of crystallites unidirectionally aligned in the substrate plane {(11 (2) over bar0) textured film}. The other is a film with c-axes parallel and perpendicular to the plane (mixed texture film). The former is expected to realize a shear wave transducer on the surfaces of various materials. The alignment of c-axes of crystallites in the plane was then carefully investigated by the X-ray pole figure analysis. The elastic anisotropy in the film has been successfully measured by the Brillouin scattering method. The (11 (2) over bar0) textured film did not excite the elastic waves; however, comparatively strong shear waves were actually excited by the mixed texture film.

引用

页码：3004 / 3007

页数：4

共 12 条

[1]

Chubachi N., 1977, Oyo Buturi, V46, P663

[2] CRYSTALLOGRAPHIC ORIENTATION OF ZINC OXIDE FILMS DEPOSITED BY TRIODE SPUTTERING [J].

FOSTER, NF .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1969, 6 (01) :111-&

[3] CONTROL OF PREFERRED ORIENTATION FOR ZNOX FILMS - CONTROL OF SELF-TEXTURE [J].

FUJIMURA, N ;

NISHIHARA, T ;

GOTO, S ;

XU, JF ;

ITO, T .

JOURNAL OF CRYSTAL GROWTH, 1993, 130 (1-2) :269-279

[4] STRUCTURES AND ELECTRICAL PROPERTIES OF ZINC OXIDE FILMS PREPARED BY LOW PRESSURE SPUTTERING SYSTEM [J].

HADA, T ;

WASA, K ;

HAYAKAWA, S .

THIN SOLID FILMS, 1971, 7 (02) :135-&

[5] PIEZOELECTRIC CHARACTERISTICS OF ZNO FILMS DEPOSITED USING AN ELECTRON-CYCLOTRON RESONANCE SPUTTERING SYSTEM [J].

KADOTA, M ;

KASANAMI, T ;

MINAKATA, M .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1992, 31 (9B) :3013-3016

[6]

KADOTA M, 2002, US200190 IEICE

[7]

KRISHNASWAMY SV, 1983, IEEE ULTR S P IEEE N, P531

[8] A new Brillouin scattering technique for the investigation of acoustic and opto-acoustic properties: application to polymers [J].

Kruger, JK ;

Embs, J ;

Brierley, J ;

Jimenez, R .

JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1998, 31 (15) :1913-1917

[9] Study of defects and interfaces in epitaxial ZnO films on (1 1 (2)over-bar 0) Al2O3 grown by electron cyclotron resonance-assisted molecular beam epitaxy [J].

Lim, SH ;

Shindo, D ;

Kang, HB ;

Nakamura, K .

JOURNAL OF CRYSTAL GROWTH, 2001, 225 (2-4) :202-207

[10] PREPARATION OF ZNO THIN FILMS BY SPUTTERING OF COMPOUND IN OXYGEN AND ARGON - (0.1 TO 10 MU THICK - SUBSTRATES - SAPPHIRE PYREX GLASS GOLD PLATE - ULTRASONICS - PIEZOELECTRICS - TRANSDUCERS - E) [J].

ROZGONYI, GA ;

POLITO, WJ .

APPLIED PHYSICS LETTERS, 1966, 8 (09) :220-&

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