The characteristics of point-heating excitation in silicon micro-mechanical resonators

被引：4

作者：

Yu, H

Wang, YL

Ding, C

Wang, YQ ^{[1
]}

Xu, YG

机构：

[1] Zhejiang Univ, Dept Informat Sci & Elect Engn, Hangzhou 310027, Peoples R China

[2] Acad Sinica, Shanghai Inst Met, State Key Labs Transducer Technol, Shanghai 200050, Peoples R China

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 1999年 / 77卷 / 03期

基金：

中国国家自然科学基金;

关键词：

micro-mechanical resonator; optical-thermal excitation; vibration mode;

D O I：

10.1016/S0924-4247(99)00064-3

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A micro-mechanical resonator is fabricated on single-crystal silicon by micro-machining technology. The resonator is excited by a modulated laser beam with small beam size. Both theoretical analysis and experimental results indicate that the resonant amplitude is a function of the excited position in the silicon cantilever. The optimum position is related to the resonant mode. These results are extremely useful for the design of the micro-resonators. (C) 1999 Elsevier Science S.A. All rights reserved.

引用

页码：187 / 190

页数：4

共 16 条

[1] SILICON RESONANT ANGULAR RATE SENSOR USING ELECTROMAGNETIC-EXCITATION AND CAPACITIVE DETECTION [J].