An analytical moderate inversion drain current model for polycrystalline silicon thin-film transistors considering deep and tail states in the grain boundary

被引:23
作者
Chen, SS
Kuo, JB
机构
[1] Dept. of Electrical Eng., National Taiwan University, Taipei, 106-17, Roosevelt Rd.
关键词
D O I
10.1063/1.361046
中图分类号
O59 [应用物理学];
学科分类号
摘要
This paper presents an analytical moderate inversion drain current model for polycrystalline silicon thin-film transistors based on localized deep and tail states in the grain boundary regions. As verified by the published data, using the analytical model, that as compared to the subthreshold region in the bulk silicon metal-oxide-silicon (MOS) devices, the less steep slope of the moderate inversion region has been explained as due to the lowering in the potential barrier height. In addition, the analytical model provides an accurate prediction that with a smaller average trap state density from the grain boundary regions, the polysilicon thin-film transistor shows a sharper moderate inversion behavior. (C) 1996 American Institute of Physics.
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页码:1961 / 1967
页数:7
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