Microtopographic analysis of turned surfaces by model-based scatterometry

被引：10

作者：

Hertzsch, A ^{[1
]}

Kröger, K ^{[1
]}

Truckenbrodt, H ^{[1
]}

机构：

[1] Tech Univ Ilmenau, Inst Lichttech & Tech Opt, PF 100565, D-96864 Ilmenau, Germany

来源：

PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY | 2002年 / 26卷 / 03期

关键词：

light scattering; surface roughness; diffraction; topography; turned surface;

D O I：

10.1016/S0141-6359(02)00116-2

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Turned surface profiles can be divided into a periodic and a random component. The periodic component is a function of the tool shape and the feed rate. The random component is caused by machine vibrations. To monitor the turning process, the periodic component is the essential global microtopographic feature which reacts sensitively to tool wear and tool scars. A measuring method evaluating the periodic component of turned surfaces is developed based upon the model-based scatterometry. Using an optimized scattering geometry, the model-based scatterometry leads to an intensified mapping of the microtopographic surface features in the angular distribution of scattered light. The profile parameters measured with the introduced scattering technique agree well with the values obtained by stylus measurements. Hence, in the range of precision engineering (R-a less than or equal to 1.5 mum) the mean profile of the dominant periodic component can be measured optically without scanning and without resorting to comparator standards. (C) 2002 Elsevier Science Inc. All rights reserved.

引用

页码：306 / 313

页数：8

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