Large-Area Synthesis of High-Quality and Uniform Graphene Films on Copper Foils

被引:9663
作者
Li, Xuesong [2 ,3 ]
Cai, Weiwei [2 ,3 ]
An, Jinho [2 ,3 ]
Kim, Seyoung [4 ]
Nah, Junghyo [4 ]
Yang, Dongxing [2 ,3 ]
Piner, Richard [2 ,3 ]
Velamakanni, Aruna [2 ,3 ]
Jung, Inhwa [2 ,3 ]
Tutuc, Emanuel [4 ]
Banerjee, Sanjay K. [4 ]
Colombo, Luigi [1 ]
Ruoff, Rodney S. [2 ,3 ]
机构
[1] Texas Instruments Inc, Dallas, TX 75243 USA
[2] Univ Texas Austin, Dept Mech Engn, Austin, TX 78712 USA
[3] Univ Texas Austin, Texas Mat Inst, Austin, TX 78712 USA
[4] Univ Texas Austin, Dept Elect & Comp Engn, Microelect Res Ctr, Austin, TX 78758 USA
关键词
FEW-LAYER GRAPHENE; CARBON; SOLUBILITY; SURFACES;
D O I
10.1126/science.1171245
中图分类号
O [数理科学和化学]; P [天文学、地球科学]; Q [生物科学]; N [自然科学总论];
学科分类号
07 ; 0710 ; 09 ;
摘要
Graphene has been attracting great interest because of its distinctive band structure and physical properties. Today, graphene is limited to small sizes because it is produced mostly by exfoliating graphite. We grew large-area graphene films of the order of centimeters on copper substrates by chemical vapor deposition using methane. The films are predominantly single-layer graphene, with a small percentage (less than 5%) of the area having few layers, and are continuous across copper surface steps and grain boundaries. The low solubility of carbon in copper appears to help make this growth process self-limiting. We also developed graphene film transfer processes to arbitrary substrates, and dual-gated field-effect transistors fabricated on silicon/silicon dioxide substrates showed electron mobilities as high as 4050 square centimeters per volt per second at room temperature.
引用
收藏
页码:1312 / 1314
页数:3
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