Imaging performance of mercuric iodide polycrystalline films

被引:25
作者
Hartsough, NE [1 ]
Iwanczyk, JS [1 ]
Patt, BE [1 ]
Skinner, NL [1 ]
机构
[1] Photon Imaging Inc, Northridge, CA 91324 USA
关键词
detector; digital X-ray; mercuric iodide; polycrystalline; X-ray; X-ray imaging;
D O I
10.1109/TNS.2004.832691
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Mercuric iodide (HgI2) polycrystalline films have great potential as direct-conversion X-ray detectors for digital X-ray imaging. We have optimized a sublimation-based film growth process to create uniform films up to 6.5 x 6.5 cm(2) with very small (< 25 mum) grain sizes on the readout side of the film. The growth techniques used can be easily extended to produce much larger film areas (> 25 cm x 25 cm). Films grown on glass substrates uniformly coated with indium tin oxide (ITO) show low dark current and high sensitivity at low bias voltages: dark current of about 0.5 nA/cm(2) and corresponding X-ray response of about 20 muC/R cm(2) (bias 0.1 V/mum, X-ray tube settings 10 mA and 70 kVp, 2-mm Al filter). Additionally, films grown on patterned ITO on glass substrates showed a similar performance for pixel sizes of 10.2 to 4 mm(2). The imaging performance results of a film grown directly on a 6.5 x 6.5 (cm(2)) thin-film transistor array with 127 mum x 127 mum pixels are presented.
引用
收藏
页码:1812 / 1816
页数:5
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