Band offset measurements of ZnO/6H-SiC heterostructure system

被引:22
作者
Alivov, Ya. I.
Xiao, B.
Fan, Q.
Morkoc, H.
Johnstone, D.
机构
[1] Virginia Commonwealth Univ, Dept Elect Engn, Richmond, VA 23284 USA
[2] SEMETROL, Chesterfield, VA 23838 USA
关键词
D O I
10.1063/1.2360924
中图分类号
O59 [应用物理学];
学科分类号
摘要
The conduction band offset of n-ZnO/n-6H-SiC heterostructures fabricated by rf-sputtered ZnO on commercial n-type 6H-SiC substrates has been measured by a variety of methods. Temperature dependent current-voltage characteristic, photocapacitance, and deep level transient spectroscopy measurements showed the conduction band offsets to be 1.25, 1.1, and 1.22 eV, respectively. (c) 2006 American Institute of Physics.
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页数:3
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