Improvement in electrical conductivity of indium tin oxide films prepared via pulsed laser deposition on electric-field-applied substrates

被引：2

作者：

Narazaki, A

Kawaguchi, Y

Niino, H

Sasaki, T

Koshizaki, N

机构：

[1] Natl Inst AIST, Photoreact Control Res Ctr, Tsukuba, Ibaraki 3058565, Japan

[2] AIST, Nanoarchitecton Res Ctr, Tsukuba, Ibaraki 3058565, Japan

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 2002年 / 41卷 / 6A期

关键词：

pulsed laser deposition on electric-field-applied substrates; ITO; volume resistivity; electric-field-induced crystallization; Joule-heating effect;

D O I：

10.1143/JJAP.41.3760

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Indium tin oxide films were fabricated by pulsed laser deposition on electric-field-applied substrates. The volume resistivity was effectively reduced when the electric current passing through films stowed a drastic increase accompanied by a subsequent small decrease. According to X-ray diffraction (XRD) measurements, the Peculiar behavior of electric Current is attributable to the electric-field-induced crystallization.

引用

页码：3760 / 3761

页数：2

共 8 条

[1] Pulsed laser deposition of crystalline indium tin oxide films at room temperature by substrate laser irradiation [J].