Ion beam induced chemical vapor deposition (IBICVD) of cobalt particles

被引：17

作者：

Lapicki, A ^{[1
]}

Ahmad, E ^{[1
]}

Suzuki, T ^{[1
]}

机构：

[1] Toyota Technol Inst, ISML, Tempaku Ku, Nagoya, Aichi 46818511, Japan

来源：

JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS | 2002年 / 240卷 / 1-3期

关键词：

cobalt; carbonyl; deposition; IBICVD; micromagnetic structures; pattern formation;

D O I：

10.1016/S0304-8853(01)00725-9

中图分类号：

T [工业技术];

学科分类号：

08 [工学];

摘要：

A novel method aiming at fabricating submicron-scale particles utilizing dicobalt octacarbonyl as a precursor for cobalt, formed upon localized ion beam induced decomposition, is presented. Patterns of deposited particles are fabricated through vector scan rastering. Measurements of cumulative magnetic properties (arrays of 2 mum-size dots) show coercivity of about 100 Oe and the saturation magnetization of approximately 1000 emu/cm(3). (C) 2002 Elsevier Science B.V. All rights reserved.

引用

页码：47 / 49

页数：3

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