Transparent conductive Sn-doped indium oxide thin films deposited by spray pyrolysis technique

被引：91

作者：

Rozati, SM ^{[1
]}

Ganj, T ^{[1
]}

机构：

[1] Univ Guilan, Dept Phys, Rasht 41335, Iran

来源：

RENEWABLE ENERGY | 2004年 / 29卷 / 10期

关键词：

In2O3 : Sn; spray pyrolysis; transparent conducting oxide;

D O I：

10.1016/j.renene.2004.01.008

中图分类号：

X [环境科学、安全科学];

学科分类号：

08 ; 0830 ;

摘要：

Films of indium oxide doped with tin (ITO) are prepared using the low cost spray pyrolysis technique. The effect of tin doping on the physical properties of In2O3 are studied. In this study the polycrystalline ITO films with the different Sri concentration of I to 100-wt% SnCl2 were prepared on Corning 7059 glass substrate. These films were confirmed to show the high crystallinity by X-ray diffraction technique. Low sheet resistance (25Omega/square) and high visible transmission (similar to82%) were obtained when the films were deposited at the tin concentration of 2-wt%. (C) 2004 Elsevier Ltd. All rights reserved.

引用

页码：1671 / 1676

页数：6

共 17 条

[1] INFLUENCE OF FILM THICKNESS AND SUBSTRATE ON THE GROWTH OF SPRAYED SNO(2) - F FILMS [J].