Shape evolution of Ge domes on Si (001) during Si capping

被引:9
作者
Rastelli, A
Kummer, M
von Känel, H
机构
[1] Univ Pavia, INFM, I-27100 Pavia, Italy
[2] Univ Pavia, Dipartimento Fis A Volta, I-27100 Pavia, Italy
[3] Swiss Fed Inst Technol, Festkorperphys Lab, CH-8093 Zurich, Switzerland
[4] Politecn Milan, Dipartimento Fis, I-20133 Milan, Italy
关键词
Ge quantum dots; capping; shape transitions;
D O I
10.1016/S1386-9477(02)00290-4
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Three-dimensional. coherently strained Ge Si (0 0 1) islands Acre overgrown with thin Si layers and their shape evolution was studied by scanning tunneling microscopy. The Si cap, necessary for exploiting the clusters as self-assembled quantum dots, intermixes with the Ge layer leading the dome-shaped islands to transform first into {105} faceted pyramids and finally into stepped mounds with steps parallel to the <1 1 0> directions. The observed morphological transitions can be understood in a general picture in which the shape of an island mainly depends on its volume and composition. (C) 2002 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:1008 / 1012
页数:5
相关论文
共 11 条
[1]   Strain-induced island scaling during Si1-xGex heteroepitaxy [J].
Dorsch, W ;
Strunk, HP ;
Wawra, H ;
Wagner, G ;
Groenen, J ;
Carles, R .
APPLIED PHYSICS LETTERS, 1998, 72 (02) :179-181
[2]   Dome-to-pyramid shape transition in Ge/Si islands due to strain relaxation by interdiffusion [J].
Henstrom, WL ;
Liu, CP ;
Gibson, JM ;
Kamins, TI ;
Williams, RS .
APPLIED PHYSICS LETTERS, 2000, 77 (11) :1623-1625
[3]   Dome-to-pyramid transition induced by alloying of Ge islands on Si(001) [J].
Kamins, TI ;
Medeiros-Ribeiro, G ;
Ohlberg, DAA ;
Williams, RS .
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1998, 67 (06) :727-730
[4]   Si overgrowth of self-assembled Ge clusters on Si(001) -: a scanning tunnelling microscopy study [J].
Kummer, M ;
Vögeli, B ;
von Känel, H .
MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, 2000, 69 :247-250
[5]   Shape transition of germanium nanocrystals on a silicon (001) surface from pyramids to domes [J].
Medeiros-Ribeiro, G ;
Bratkovski, AM ;
Kamins, TI ;
Ohlberg, DAA ;
Williams, RS .
SCIENCE, 1998, 279 (5349) :353-355
[6]  
MULLER E, IN PRESS P ROYAL MIC
[7]   Reversible shape evolution of Ge islands on Si(001) -: art. no. 256101 [J].
Rastelli, A ;
Kummer, M ;
von Känel, H .
PHYSICAL REVIEW LETTERS, 2001, 87 (25) :256101-1
[8]   Transition states between pyramids and domes during Ge/Si island growth [J].
Ross, FM ;
Tromp, RM ;
Reuter, MC .
SCIENCE, 1999, 286 (5446) :1931-1934
[9]   Effect of overgrowth temperature on the photoluminescence of Ge/Si islands [J].
Schmidt, OG ;
Denker, U ;
Eberl, K ;
Kienzle, O ;
Ernst, F .
APPLIED PHYSICS LETTERS, 2000, 77 (16) :2509-2511
[10]   Embedding of nanoscale 3D SiGe islands in a Si matrix [J].
Sutter, P ;
Lagally, MG .
PHYSICAL REVIEW LETTERS, 1998, 81 (16) :3471-3474