Focused ion beams in future nanoscale probe recording

被引：12

作者：

Litvinov, D ^{[1
]}

Khizroev, S

机构：

[1] Univ Michigan, Ann Arbor, MI 48109 USA

[2] Carnegie Mellon Univ, Pittsburgh, PA 15213 USA

来源：

NANOTECHNOLOGY | 2002年 / 13卷 / 02期

关键词：

D O I：

10.1088/0957-4484/13/2/310

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Focused ion beam (FIB) applications in the field of nanoscale probe recording are explored. A detailed description of how to use FIBS for trimming longitudinal and perpendicular magnetic recording and playback devices to dimensions of less than 100 nm is presented. An experiment was conducted to demonstrate that the magnetoresistive property of a read element, e.g. a giant-magnetoresistive sensor, strongly depends on the focused ion current and the beam accelerating voltage.

引用

收藏

页码：179 / 184

页数：6

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