MgO Microparticle Deposition by Radio Frequency Impulse Discharge in a Small-Diameter Tube

被引：2

作者：

Muraoka, Takumasa ^{[1
]}

Iizuka, Satoru ^{[1
]}

机构：

[1] Tohoku Univ, Dept Elect Engn, Aoba Ku, Sendai, Miyagi 9808579, Japan

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS | 2009年 / 48卷 / 02期

关键词：

NARROW TUBE; INNER; SURFACE;

D O I：

10.1143/JJAP.48.025501

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Inner wall surface coating has been performed in, Ar/O-2 microplasma produced by radio frequency (RF) impulse discharge using a Mg rod electrode in a narrow glass-tube. We found formation of MgO microparticles, together with a relatively flat film consisting of MgO between these microparticles. The MgO film containing MgO microparticles was regarded as an efficient secondary electron emission surface for a low-voltage discharge. Effects of oxygen on the formation of MgO microparticles were investigated under different conditions of Ar/O-2 mixing ratio. It was found that the MgO microparticles were produced even in the case of a low oxygen mixing ratio. (C) 2009 The Japan Society of Applied Physics

引用

页数：4

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