Removable tubing interconnects for glass-based micro-fluidic systems made using ECDM

被引：74

作者：

Lee, ES ^{[1
]}

Howard, D ^{[1
]}

Liang, E ^{[1
]}

Collins, SD ^{[1
]}

Smith, RL ^{[1
]}

机构：

[1] Univ Calif Davis, Dept Elect Engn, Micro Inst & Syst Lab, Davis, CA 95616 USA

来源：

JOURNAL OF MICROMECHANICS AND MICROENGINEERING | 2004年 / 14卷 / 04期

关键词：

D O I：

10.1088/0960-1317/14/4/014

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Reversible tubing connections for glass micro-fluidic systems are realized using electro-chemical discharge machining of three-dimensional glass vias. The connections reversibly connect standard sized plastic tubing to holes in borosilicate microscope slides. Tubing connections are demonstrated on a sealed, micro-fluidic channel which is fabricated between two glass slides using SU-8. The connections are experimentally tested to withstand up to 30 psi (similar to206 kPa) of air pressure without leaking.

引用

页码：535 / 541

页数：7

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