Non-contact atomic force microscope with a PZT cantilever used for deflection sensing, direct oscillation and feedback actuation

被引：29

作者：

Miyahara, Y ^{[1
]}

Deschler, M

Fujii, T

Watanabe, S

Bleuler, H

机构：

[1] Ecole Polytech Fed Lausanne, Dept Microtech, CH-1015 Lausanne, Switzerland

[2] Nikon Inc, Optoelect Mat Lab, Nikon, Japan

来源：

APPLIED SURFACE SCIENCE | 2002年 / 188卷 / 3-4期

关键词：

non-contact atomic force microscope; piezoelectric cantilever; frequency modulation technique; lever feedback actuation;

D O I：

10.1016/S0169-4332(01)00929-1

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

A non-contact atomic force microscope (NC-AFM) based on a microfabricated piezoelectric cantilever is presented. A single piezoelectric lead zirconate titanate thin film layer on the cantilever serves as deflection sensing, cantilever oscillation and feedback actuation. Since such an AFM requires neither external oscillator nor external deflection sensor, considerably simple instrumentation becomes possible even for extreme environments such as low temperature or ultra-high vacuum. Also feedback control by the integrated actuator in the cantilever makes faster scanning possible. Images of atomic steps on annealed sapphire (0001) surfaces have been observed in air atmosphere in frequency modulation mode. (C) 2002 Elsevier Science B.V. All rights reserved.

引用

页码：450 / 455

页数：6

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