Structural and optical modification in hafnium oxide thin films related to the momentum parameter transferred by ion beam assistance

Hafnium oxide (HfO2) films were deposited on silica and glass substrates by ion (Xe+) assisted deposition with increasing ion momentum transfer to the growing film. The relationship among the ion momentum values, the crystalline phase and the refractive index (packing density) has been worked out by means of X-ray diffraction and spectrophotometric analysis. Compaction of the films by ion beam assistance is clearly evidenced by the changes in their microstructure. A three steps transition from a random monoclinic phase, via amorphous phase, up to an highly phase oriented (fiber texture), as a function of ion momentum, has been found. (C) 1999 Elsevier Science S.A. All rights reserved.