RHEED intensity oscillations observed during growth of Ge on Si(111) substrates

被引:17
作者
Daniluk, A
Mazurek, P
Mikolajczak, P
机构
[1] Department of Experimental Physics, Institute of Physics, Maria Curie-Skłodowska Univ., 20-031 Lublin
关键词
germanium; growth; molecular beam epitaxy; reflection high-energy electron diffraction (RHEED); scattering potential; Schrodinger equation; silicon;
D O I
10.1016/S0039-6028(96)00924-7
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
Reflection high-energy electron diffraction (RHEED) intensity oscillations were observed during molecular beam epitaxy growth of Ge on a Si(111) surface. At 250 degrees C the oscillations continue up to 6 ML. When Ge is grown at room temperature on the Ge/Si(111) surface the oscillations continue up to 14 ML. During the growth of Ge thin films on a clean Si(111)-7x7 surface at room temperature the oscillations continue up to 10 ML. The intensity of the reflected beam is calculated by solving the one-dimensional Schrodinger equation. A simple birth-death model was used for the growth simulation in order to investigate fundamental behaviours of reflectivity change during the Stranski-Krastanov growth of Ge on the Si(111) surface at 250 degrees C.
引用
收藏
页码:91 / 98
页数:8
相关论文
共 17 条
[1]   BIRTH DEATH MODELS OF EPITAXY .1. DIFFRACTION OSCILLATIONS FROM LOW INDEX SURFACES [J].
COHEN, PI ;
PETRICH, GS ;
PUKITE, PR ;
WHALEY, GJ ;
ARROTT, AS .
SURFACE SCIENCE, 1989, 216 (1-2) :222-248
[2]   CURRENT UNDERSTANDING AND APPLICATIONS OF THE RHEED INTENSITY OSCILLATION TECHNIQUE [J].
DOBSON, PJ ;
JOYCE, BA ;
NEAVE, JH ;
ZHANG, J .
JOURNAL OF CRYSTAL GROWTH, 1987, 81 (1-4) :1-8
[3]   STATISTICAL TREATMENT OF DYNAMICAL ELECTRON-DIFFRACTION FROM GROWING SURFACES [J].
DUDAREV, SL ;
VVEDENSKY, DD ;
WHELAN, MJ .
PHYSICAL REVIEW B, 1994, 50 (19) :14525-14538
[4]   REFLECTION HIGH-ENERGY ELECTRON-DIFFRACTION STUDY OF THE GROWTH OF GE ON THE GE(111) SURFACE [J].
FUKUTANI, K ;
DAIMON, H ;
INO, S .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1992, 31 (10) :3429-3435
[5]  
HARRIS JJ, 1984, SURF SCI, V139, P121
[6]   PB PREADSORPTION FACILITATES ISLAND FORMATION DURING GA GROWTH ON SI(111) [J].
HIBINO, H ;
SHIMIZU, N ;
SUMITOMO, K ;
SHINODA, Y ;
NISHIOKA, T ;
OGINO, T .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 1994, 12 (01) :23-28
[7]   DYNAMICAL DIFFRACTION EFFECT FOR RHEED INTENSITY OSCILLATIONS - PHASE-SHIFT OF OSCILLATIONS FOR GLANCING ANGLES [J].
HORIO, Y ;
ICHIMIYA, A .
SURFACE SCIENCE, 1993, 298 (2-3) :261-272
[8]   PHASE-SHIFT AND FREQUENCY-DOUBLING ON INTENSITY OSCILLATIONS OF REFLECTION HIGH-ENERGY ELECTRON-DIFFRACTION - ONE-BEAM DYNAMICAL CALCULATIONS FOR GE ON GE(111) SURFACE [J].
HORIO, Y ;
ICHIMIYA, A .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1994, 33 (3A) :L377-L379
[9]  
Jiang Jian-sheng, 1984, Acta Physica Sinica, V33, P845
[10]   RHEED FROM STEPPED SURFACES AND ITS RELATION TO RHEED INTENSITY OSCILLATIONS OBSERVED DURING MBE [J].
KAWAMURA, T ;
MAKSYM, PA .
SURFACE SCIENCE, 1985, 161 (01) :12-24