REFLECTION HIGH-ENERGY ELECTRON-DIFFRACTION STUDY OF THE GROWTH OF GE ON THE GE(111) SURFACE

被引：17

作者：

FUKUTANI, K ^{[1
]}

DAIMON, H ^{[1
]}

INO, S ^{[1
]}

机构：

[1] UNIV TOKYO,DEPT PHYS,BUNKYO KU,TOKYO 113,JAPAN

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1992年 / 31卷 / 10期

关键词：

RHEED OSCILLATION; MONOLAYER MODE; GE(111); ROCKING CURVE; SPOT PROFILE;

D O I：

10.1143/JJAP.31.3429

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Intensity oscillations, spot profiles and rocking curves of the (00) rod in reflection high-energy electron diffraction (RHEED) during the growth of Ge on the Ge(111) surface are investigated under various conditions. Two types of RHEED intensity oscillations with a period of one monolayer have been observed at specific conditions. One type of oscillation observed at a substrate temperature of 180-degrees-C is ascribed to the overlapping of the specular reflection and the 333 bulk reflection. The other type of monolayer oscillation observed at a low substrate temperature for a low glancing angle suggests the monolayer mode growth. Rocking curves of the (00) rod have been measured at various stages of growth, which demonstrate the periodic change of the intensity distribution of the rod during growth.

引用

页码：3429 / 3435

页数：7

共 25 条

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