Functional and structural properties of thin electroceramic films by laser radiation

被引：5

作者：

Kreutz, EW ^{[1
]}

Gottmann, J ^{[1
]}

Mergens, M ^{[1
]}

Klotzbücher, T ^{[1
]}

Vosseler, B ^{[1
]}

机构：

[1] Rhein Westfal TH Klinikum, Lehrstuhl Lasertech, D-52074 Aachen, Germany

来源：

SURFACE & COATINGS TECHNOLOGY | 1999年 / 116卷

关键词：

barium titanate; electroceramic films; lead zirconate titanate; pulsed laser deposition;

D O I：

10.1016/S0257-8972(99)00272-8

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

The deposition of single layer electroceramic (BaTiO3, PbZr0.52Ti0.48O3) thins films by pulsed excimer laser radiation (248 nm) on Ti/Pt/Si (111) substrates is investigated as a function of laser parameters (fluence, repetition rate, beam geometry) and processing variables (pressure and composition of processing gas, target-substrate arrangement) under conditions of various temporal and spatial properties of the involved vapor and/or plasma states represented in the type, number, ionization degree, momentum. and energy of the ensemble of species generated. The film characteristics were measured using scanning electron microscopy, X-ray diffraction,, Raman spectroscopy, ellipsometry and impedance measurements. The experimental results are related to theoretical results of film growth calculating the densification of the films via momentum transfer and the temperature of the films via energy storage. The him properties are discussed in view of suitable permittivities and coupling coefficients for electrical. sensoric and actuatoric applications. (C) 1999 Elsevier Science S.A. All rights reserved.

引用

页码：1219 / 1227

页数：9

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