[1] Dalian Univ Technol, Lab Plasma Phys Chem, Dalian 116024, Peoples R China
[2] Heilongjiang Inst Sci & Technol, Harbin 150027, Peoples R China
[3] Dalian Univ Technol, State Key Lab Mat Modificat Ion Electron & Laser, Dalian 116024, Peoples R China