Atomic force microscopy study of the morphological shape of thin film buckling

被引：47

作者：

Coupeau, C ^{[1
]}

机构：

[1] Univ Poitiers, Met Phys Lab, UFR Sci, F-86962 Futuroscope, France

来源：

THIN SOLID FILMS | 2002年 / 406卷 / 1-2期

关键词：

thin films; buckling patterns; atomic force microscopy;

D O I：

10.1016/S0040-6090(01)01772-2

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Thin films elaborated by sputtering methods often develop very high internal compressive stresses and are then susceptible to delamination and buckling. The various buckling patterns have been investigated by atomic force microscopy and are reviewed and discussed in the frame of elastic theory. (C) 2002 Elsevier Science B.V. All tights reserved.

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页码：190 / 194

页数：5

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