Effects of fabrication process parameters on the properties of cyclic olefin copolymer microfluidic devices

被引:49
作者
Fredrickson, Carl K. [1 ]
Xia, Zheng
Das, Champak
Ferguson, Ryan
Tavares, Fernando T.
Fan, Z. Hugh
机构
[1] Univ Florida, Dept Mech & Aerosp Engn, Gainesville, FL 32611 USA
[2] Univ Florida, Dept Biomed Engn, Gainesville, FL 32611 USA
基金
美国国家科学基金会; 美国国家航空航天局;
关键词
bonding; electrophoresis; microfluidics; micromachining; molding; plastics;
D O I
10.1109/JMEMS.2006.880352
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Among the materials used for fabricating microfluidic devices, plastics have been increasingly employed in the past few years. Although several methods for fabricating plastic devices have appeared in the literature, reports typically indicate one set of conditions that yield functional devices; little data are available detailing how results are affected by their changes in the process variables. We report in this paper a systematic study of fabrication process parameters including compression rate, molding temperature, and the force used by a hydraulic press, as well as their effects on the device properties. Using cyclic olefin copolymers as the molding material, we found that the device thickness decreased when the molding temperature and compression force increased. Fidelity in the pattern transfer from a master to a device was confirmed by the reproduction of nanostructures and channel depth/shape. Pattern transfer fidelity appeared to be independent of the molding temperature and compression force, at least in the range of conditions we investigated. Stress whitening (or crazing) on the device surface was found to be related to the molding temperature and the cooling rate of the mold/device assembly. The bond strength between the layers of a laminated device was determined to be a function of the lamination temperature. In addition, we demonstrated the utility of a plastic microfluidic device by separating proteins.
引用
收藏
页码:1060 / 1068
页数:9
相关论文
共 64 条
[21]   A polymeric microfluidic chip for CE/MS determination of small molecules [J].
Kameoka, J ;
Craighead, HG ;
Zhang, HW ;
Henion, J .
ANALYTICAL CHEMISTRY, 2001, 73 (09) :1935-1941
[22]   Dynamics of single-protein molecules at a liquid/solid interface: Implications in capillary electrophoresis and chromatography [J].
Kang, SH ;
Yeung, ES .
ANALYTICAL CHEMISTRY, 2002, 74 (24) :6334-6339
[23]   Cationic starch derivatives as dynamic coating additives for analysis of amino acids and peptides using poly(methyl methacrylate) microfluidic devices [J].
Kato, M ;
Gyoten, Y ;
Sakai-Kato, K ;
Nakajima, T ;
Toyo'oka, T .
ANALYTICAL CHEMISTRY, 2004, 76 (22) :6792-6796
[24]   Phase-changing sacrificial materials for solvent bonding of high-performance polymeric capillary electrophoresis microchips [J].
Kelly, RT ;
Pan, T ;
Woolley, AT .
ANALYTICAL CHEMISTRY, 2005, 77 (11) :3536-3541
[25]   A serpentine laminating micromixer combining splitting/recombination and advection [J].
Kim, DS ;
Lee, SH ;
Kwon, TH ;
Ahn, CH .
LAB ON A CHIP, 2005, 5 (07) :739-747
[26]   CO2-laser micromachining and back-end processing for rapid production of PMMA-based microfluidic systems [J].
Klank, H ;
Kutter, JP ;
Geschke, O .
LAB ON A CHIP, 2002, 2 (04) :242-246
[27]   Integrating polymerase chain reaction, valving, and electrophoresis in a plastic device for bacterial detection [J].
Koh, CG ;
Tan, W ;
Zhao, MQ ;
Ricco, AJ ;
Fan, ZH .
ANALYTICAL CHEMISTRY, 2003, 75 (17) :4591-4598
[28]   Design of a compact disk-like microfluidic platform for enzyme-linked immunosorbent assay [J].
Lai, S ;
Wang, SN ;
Luo, J ;
Lee, LJ ;
Yang, ST ;
Madou, MJ .
ANALYTICAL CHEMISTRY, 2004, 76 (07) :1832-1837
[29]   Integration of isoelectric focusing with parallel sodium dodecyl sulfate gel electrophoresis for multidimensional protein separations in a plastic microfludic network [J].
Li, Y ;
Buch, JS ;
Rosenberger, F ;
DeVoe, DL ;
Lee, CS .
ANALYTICAL CHEMISTRY, 2004, 76 (03) :742-748
[30]   Surface-modified poly(methyl methacrylate) capillary electrophoresis microchips for protein and peptide analysis [J].
Liu, JK ;
Pan, T ;
Woolley, AT ;
Lee, ML .
ANALYTICAL CHEMISTRY, 2004, 76 (23) :6948-6955