Silicon-on-insulator waveguide photodetector with Ge/Si self-assembled islands

被引:26
作者
El kurdi, M
Boucaud, P
Sauvage, S
Fishman, G
Kermarrec, O
Campidelli, Y
Bensahel, D
Saint-Girons, G
Sagnes, I
Patriarche, G
机构
[1] Univ Paris 11, Inst Elect Fondamentale, CNRS, UMR 8622, F-91405 Orsay, France
[2] STMicroelect, F-38926 Crolles, France
[3] Lab Photon & Nanostruct, F-91406 Marcoussis, France
关键词
D O I
10.1063/1.1493656
中图分类号
O59 [应用物理学];
学科分类号
摘要
We have investigated a silicon-based near-infrared photodetector using a waveguide with strong optical confinement. The high-difference index waveguide is obtained with a silicon-on-insulator substrate. The optically active region consists of self-assembled Ge/Si islands embedded in a p-i-n junction. The Ge/Si islands grown by high-pressure chemical-vapor deposition exhibit a broad photoluminescence and electroluminescence which are resonant around 1.5 mum. The photoluminescence and electroluminescence energies are correlated to the island size and to the island composition using a six-band k.p calculation. The spectral responsivity of the detectors is measured in a front facet coupling geometry with a broadband source and with semiconductor laser diodes. For a 0 V applied bias, responsivities of 25 and 0.25 mA/W are measured at room temperature at 1.3 and 1.55 mum, respectively. (C) 2002 American Institute of Physics.
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页码:1858 / 1861
页数:4
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