Indium versus hydrogen-terminated GaN(0001) surfaces: Surfactant effect of indium in a chemical vapor deposition environment

被引:62
作者
Northrup, JE [1 ]
Van de Walle, CG [1 ]
机构
[1] Palo Alto Res Ctr, Palo Alto, CA 94304 USA
关键词
D O I
10.1063/1.1757020
中图分类号
O59 [应用物理学];
学科分类号
摘要
First-principles pseudopotential density functional calculations of the relative stability of H- and In-terminated GaN(0001) surfaces are reported. These total energy calculations show that surfaces terminated by one or two monolayers of In are more stable under typical metalorganic vapor deposition conditions than the H-terminated surface structures that have been proposed. Indium may act as a surfactant to improve the growth morphology of GaN films grown by metalorganic vapor deposition via a mechanism similar to that operative in molecular beam epitaxy. (C) 2004 American Institute of Physics.
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收藏
页码:4322 / 4324
页数:3
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