Sol-gel PZT for MEMS applications

被引：12

作者：

Piekarski, B ^{[1
]}

Dubey, M

Zakar, E

Polcawich, R

DeVoe, D

Wickenden, D

机构：

[1] USA, Res Lab, Adelphi, MD 20783 USA

[2] Univ Maryland, Dept Mech Engn, College Pk, MD 20742 USA

[3] Univ Maryland, Syst Res Inst, College Pk, MD 20742 USA

[4] Johns Hopkins Univ, Appl Phys Lab, Laurel, MD 20723 USA

来源：

INTEGRATED FERROELECTRICS | 2002年 / 42卷

关键词：

PZT; MEMS resonators; MEMS magnetometer; MEMS pumps; MEMS pressure sensors;

D O I：

10.1080/10584580210868

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Thin-film piezoelectric materials offer an alternative transduction mechanism to electrostatic actuation and capacitive sensing with many attractive advantages for applications in microelectromechanical systems (MEMS). Researchers at the U.S. Army Research Laboratory are utilizing sot-gel deposited lead zirconate titanate (PZT) thin-films in developing several new MEMS technologies, including high frequency filters, magnetometers, micropumps, and pressure sensors. The fabrication procedure and an overview of the technologies being developed are reported.

引用

页码：25 / 37

页数：13

共 12 条

[1]

Budd K. D., 1985, British Ceramic Proceedings, P107

[2]

DeVoe, 1997, THESIS U CALIFORNIA

[3] Piezoelectric thin film micromechanical beam resonators [J].

DeVoe, DL .

SENSORS AND ACTUATORS A-PHYSICAL, 2001, 88 (03) :263-272

[4] A high sensitivity, wide dynamic range magnetometer designed on a xylophone resonator [J].

Givens, RB ;

Murphy, JC ;

Osiander, R ;

Kistenmacher, TJ ;

Wickenden, DK .

APPLIED PHYSICS LETTERS, 1996, 69 (18) :2755-2757

[5] Fabrication of suspended piezoelectric microresonators [J].

Piekarski, B ;

Dubey, M ;

Devoe, D ;

Zakar, E ;

Zeto, R ;

Conrad, J ;

Piekarz, R ;

Ervin, M .

INTEGRATED FERROELECTRICS, 1999, 24 (1-4) :147-154

[6]

PIEKARSKI B, 2001, SENSOR ACTUAT A-PHYS, V3013, P1

[7]

TROLIERMCKINSTR.S, 1998, MANUFACTURABLE SOL G

[8]

WICKENDEN D, 1999, NANOTECHNOLOGY MICRO

[9]

ZAKAR E, 2000, P 12 IEEE INT S APPL

[10]

ZAKAR E, 2000, J AM VAC SOC

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