In situ interferometric alignment systems for the assembly of microchannel relay systems

被引：19

作者：

Robertson, B ^{[1
]}

Liu, YS ^{[1
]}

Boisset, GC ^{[1
]}

Tagizadeh, MR ^{[1
]}

Plant, DV ^{[1
]}

机构：

[1] HERIOT WATT UNIV,DEPT PHYS,EDINBURGH EH14 4AS,MIDLOTHIAN,SCOTLAND

来源：

APPLIED OPTICS | 1997年 / 36卷 / 35期

关键词：

alignment; interferometric; lenslet array packaging;

D O I：

10.1364/AO.36.009253

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

An interferometric alignment technique developed for the assembly of microchannel relay systems is described. The method uses pairs of diffractive lenslets that are arranged to form compact in situ interferometers. The relative transverse, longitudinal, and rotational alignment of the two lenslet arrays can be quantitatively determined from the resulting interference patterns. The theoretical analysis is compared with the experimental performance. (C) 1997 Optical Society of America.

引用

页码：9253 / 9260

页数：8

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