Intrinsic tensile stress and grain boundary formation during Volmer-Weber film growth

被引：46

作者：

Rajamani, A ^{[1
]}

Sheldon, BW ^{[1
]}

Chason, E ^{[1
]}

Bower, AF ^{[1
]}

机构：

[1] Brown Univ, Div Engn, Providence, RI 02912 USA

来源：

APPLIED PHYSICS LETTERS | 2002年 / 81卷 / 07期

关键词：

D O I：

10.1063/1.1494459

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The finite element calculations in this letter present a detailed picture of tensile stress evolution during island coalescence in polycrystalline films. Earlier models suggest that these stresses are produced only when islands initially coalesce. In contrast, our model predicts that stress evolution is an inherent part of the growth process when two neighboring surfaces grow together to form a grain boundary. This view of coalescence stress is also consistent with experimental observations. (C) 2002 American Institute of Physics.

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页码：1204 / 1206

页数：3

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