Polymer microfabrication technologies

被引：153

作者：

Rötting, O

Röpke, W

Becker, H

Gärtner, C

机构：

[1] MILDENDO GmbH, D-07745 Jena, Germany

[2] Applikat Zentrum Mikrotech Jena, D-07743 Jena, Germany

来源：

MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS | 2002年 / 8卷 / 01期

关键词：

D O I：

10.1007/s00542-002-0106-9

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The need for low-cost microfabrication technologies in modern life-sciences is described. The article compares the replication technologies, hot embossing and micro-injection moulding and gives an overview over the technologies used for fabrication of the replication masters. The back-end processes transforming the replicated plastic part into a complete microsystem are described. Some manufacturing issues of mass production are discussed.

引用

页码：32 / 36

页数：5

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